Wafer And Spatial
Wafer map modes
Section titled “Wafer map modes”The wafer map supports these modes:
- hard bin
- soft bin
- pass/fail
- parametric heat map for a selected test
Parametric mode shows the test value on the wafer, not just the bin or pass/fail result.
When to use parametric mode
Section titled “When to use parametric mode”Use it when you are looking for:
- center-to-edge drift
- quadrant asymmetry
- radial bands
- reticle or chuck signatures
- hotspot structure before it becomes yield loss
Spatial analysis card
Section titled “Spatial analysis card”The spatial card turns wafer patterns into selection controls.
You can select:
- edge vs core
- radial bands
- quadrants
- hotspots
- selected wafer or lot-stack scope
These selections flow through the same shared selection state as the other analysis surfaces.
Best practice
Section titled “Best practice”Start with the wafer map if you suspect process structure.
Then:
- confirm the pattern in spatial analysis
- push the region as a selection
- inspect that same population in histogram or scatter
